Name of the Equipment | Spire Sun Simulator |
Group | Module Reliability |
Category | clean |
Operator | |
System Owner | Tarun Sahu tarun.s@iitb.ac.in Bhavya Jyothi K Naga 163079019@iitb.ac.in |
| Make / Model | SPI-SUN SIMULATOR 5600SLP |
| Information | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | NCPRE Module Lab-1 |
| AMC | Required |
| Local Dealer | |
| Actual Dealer | |
| SOP | SOP/27_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | |
| Access | Open |
| Lab Phone No | 3589 |
| Substrate allowed | |
| Substrate Dimension | |
| Chemical allowed | , |
| Precursors/ Targets available *Based on stock availability | |
| Precursor/ Target loaded inside tool | 4 |
| Target dimension | |
| Gases allowed | |
| Contamination remarks |